Q:

To grow the polysilicon gate layer, which of the following chemical is used for chemical vapour deposition?

A) Silicon Nitride(Si3N4) B) Silane gas(SiH4)
C) Silicon oxide D) None of the mentioned
 
Answer & Explanation Answer: B) Silane gas(SiH4)

Explanation: Silicon Wafer is placed in a reactor with silane gas (SiH4), and they are heated again to grow the polysilicon layer by chemical vapor deposition.

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Category: Electronics & Electrical MCQs
Sub Category: VLSI Mcqs

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